X-ray optics made by X-ray lithography: Process optimization and quality control – Frieder Johannes Koch, Kartoniert (TB)

Erscheinungsjahr: 2017 | Seiten: 170 Seiten

Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample’s microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio – their fabrication by X-ray lithography with optimal structure quality is the topic of this work.

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